Temat: comb-drive capacitive microaccelerometer

Skocz do pozycji: 1.

Tytuł:: Development of HDL Models of Heterogeneous Microsystems for Behavioral Level of Computer-Aided Design
Autorzy:: Holovatyy, Andriy
Lobur, Mykhaylo
Kolesnyk, Kostyantyn
Kernytskyy, Andriy
Vichkovskyy, Vladyslav
Yazh, Andriy
Tematy:: Micro-Electro-Mechanical Systems (MEMS)
MEMS crab-leg resonator
comb-drive capacitive microaccelerometer
sigma-delta control
VHDL-AMS
Verilog-AMS
hAMSter
SMASH
computer-aided design; Pokaż więcej
Wydawca:: Politechnika Białostocka. Oficyna Wydawnicza Politechniki Białostockiej
Powiązania:: https://bibliotekanauki.pl/chapters/60016603.pdf Link otwiera się w nowym oknie
Opis:: In this paper, HDL models of heterogeneous sensor microsystems are developed. The developed models make it possible to perform the behavioral simulation of MEMS comb-drive capacitive and piezoresistive accelerometers, MEMS accelerometer with delta-sigma ADC and also to conduct the analysis of such heterogeneous microsystems as MEMS at the functional design level.
Dostawca treści:: Biblioteka Nauki

Artykuł

Skocz do pozycji: 2.

Tytuł:: Verilog – ams model of comb-drive sensing element of integrated capacitive microaccelerometer for behavioral level of computer aid design
Autorzy:: Holovatyy, A.
Teslyuk, V.
Lobur, M.
Tematy:: micro-electro-mechanical systems
MEMS
micromachining technologies
micromechanical comb-drive sensing element
integrated capacitive microaccelerometer
acceleration
SMASH
Verilog-AMS hardware description language
computer-aided design; Pokaż więcej
Wydawca:: Polska Akademia Nauk. Oddział w Lublinie PAN
Powiązania:: https://bibliotekanauki.pl/articles/411193.pdf Link otwiera się w nowym oknie
Opis:: The article presents Verilog – AMS model of the comb-drive sensing element of the integrated capacitive microaccelerometer. The suggested model allows to simulate the reaction of the sensing element effected by the applied force of acceleration, changes of its comb-drive capacities, output voltages and currents for determining its constructive parameters and for analysis of the mechanical module of the integrated device at the behavioral level of computer-aided design.
Dostawca treści:: Biblioteka Nauki

Artykuł

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